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PLANAR MOTORS


LMSP Series Planar Motor


XY movements on an air bearing through a planar-servo motor with integrated distance measurement. Can be operated upside down. The planar motor LMSP has integrated distance measurement sensors and works with position control (closed loop).

Features:

  • Low profile XY table
  • Closed loop
  • Air bearing free of wear
  • No externally measurable magnetic fields
  • Very low heat generation
  • Can be mounted upside down
  • Stator area up to 1000 x 1000 mm

General Characteristic

LMDX Series Servo Drive


The servo drive LMDX for the planar servo motor LMSP is available in two different voltage versions and with an optional digital I/O interface card.
General Characteristic